Charge-Discharge Induced Phase Transformation of RuO2 Electrode for Thin Film Supercapacitor

Han Ki Kim; Tae Yeon Seong; S. M. Lee; Young Soo Yoon

doi:10.1007/BF03027042

Charge-Discharge Induced Phase Transformation of RuO₂ Electrode for Thin Film Supercapacitor

Han Ki Kim, Tae Yeon Seong, S. M. Lee, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO₂ electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO ₂/LiPON/RuO₂ structure clearly demonstrated the cyclibility dependence of the RuO₂ electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of 'the thin film supercapacitor are dependent on the microstructure of the RuO₂ film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO₂ acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor.

Original language	English
Pages (from-to)	239-246
Number of pages	8
Journal	Metals and Materials International
Volume	9
Issue number	3
DOIs	https://doi.org/10.1007/BF03027042
Publication status	Published - 2003 Jun
Externally published	Yes

Keywords

Cyclibility
Glancing angle X-ray diffraction (GXRD)
LiPON
RuO
Supercapacitor
Transmission electron microscope (TEM)

ASJC Scopus subject areas

Condensed Matter Physics
Mechanics of Materials
Metals and Alloys
Materials Chemistry

Access to Document

10.1007/BF03027042

Cite this

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title = "Charge-Discharge Induced Phase Transformation of RuO2 Electrode for Thin Film Supercapacitor",

abstract = "We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO 2/LiPON/RuO2 structure clearly demonstrated the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of 'the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor.",

keywords = "Cyclibility, Glancing angle X-ray diffraction (GXRD), LiPON, RuO, Supercapacitor, Transmission electron microscope (TEM)",

author = "Kim, {Han Ki} and Seong, {Tae Yeon} and Lee, {S. M.} and Yoon, {Young Soo}",

year = "2003",

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doi = "10.1007/BF03027042",

language = "English",

volume = "9",

pages = "239--246",

journal = "Metals and Materials International",

issn = "1598-9623",

publisher = "Korean Institute of Metals and Materials",

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TY - JOUR

T1 - Charge-Discharge Induced Phase Transformation of RuO2 Electrode for Thin Film Supercapacitor

AU - Kim, Han Ki

AU - Seong, Tae Yeon

AU - Lee, S. M.

AU - Yoon, Young Soo

PY - 2003/6

Y1 - 2003/6

N2 - We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO 2/LiPON/RuO2 structure clearly demonstrated the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of 'the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor.

AB - We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO 2/LiPON/RuO2 structure clearly demonstrated the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of 'the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor.

KW - Cyclibility

KW - Glancing angle X-ray diffraction (GXRD)

KW - LiPON

KW - RuO

KW - Supercapacitor

KW - Transmission electron microscope (TEM)

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