Cl2-based dry etching of GaN and InGaN using inductively coupled plasma the effects of gas additives

Ji Myon Lee, Ki Myung Chang, In Hwan Lee, Seong Ju Park

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41 Citations (Scopus)


The effects of added H2, Ar, and CH4 gases on the etch characteristics of GaN and InGaN were studied using an inductively coupled Cl2-based plasma. Each added gas had a unique effect on the etch rate, anisotropy, surface roughness, and sidewall morphology. The most anisotropic etch profile was obtained using Cl2, but the etched surface showed the roughest morphology and was covered with etch residues, the origins of which were the micromasking of the sputtered dielectric. When H2 gas was added to the Cl2 plasma, the etch residues were removed and the surface roughness was decreased, even though the etch rate was slightly decreased. The etch rate of GaN by Cl2/H2/Ar plasmas was saturated above an Ar flow rate of 16 sccm and the surface roughness of the etched GaN was lower, compared with Cl2/H2 plasmas at low source power. Finally, it was found that the In compound was etched as a result of reaction with CH4.

Original languageEnglish
Pages (from-to)1859-1863
Number of pages5
JournalJournal of the Electrochemical Society
Issue number5
Publication statusPublished - 2000 May
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry


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