Comparative study on energy consumption in ateam-humidification- and water-spray-humidification-type outdoor air-conditioning systems for semiconductor manufacturing clean rooms

  • Hyung Tae Kim
  • , Gen Soo Song
  • , Ki Cheol Kim
  • , Kyung Hoon Yoo*
  • , Seung Woo Son
  • , Dae Kun Shin
  • , Dug Jun Park
  • , Oh Myung Kwon
  • *Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

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    Engineering