Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing

Seungmoo Lee, Jaihyung Won, Jongsik Choi, Jihun Park, Yeonhong Jee, Hyeondeok Lee, Dongjin Byun

    Research output: Contribution to journal › Article › peer-review

    22 Citations (Scopus)

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    Keyphrases

    Engineering

    Chemistry

    Chemical Engineering

    Material Science