Abstract
The leakage current-voltage characteristics of rf-magnetron sputtered BaTa2O6 film in a capacitor with the top aluminum and the bottom indium-tin-oxide electrodes have been investigated as a function of applied field and temperature. In order to study the effect of the surface treatment on the electrical characteristics of as-deposited film we performed an oxygen plasma treatment on BaTa2O6 surface. The dc current-voltage, bipolar pulse charge-voltage, dc current-time, and small ac signal capacitance-frequency characteristics were measured to study the electrical and the dielectric properties of BaTa2O6 thin film. All of the BaTa2O6 films in this study exhibited a low leakage current, a high breakdown field strength (3-4.5 MV/cm), and a high dielectric constant (20-30). From the temperature dependence of the leakage current, we could conclude that the dominant conduction mechanism under high electrical fields (>1 MV/cm) is ascribed to the Schottky emission while the ohmic conduction is dominant at low electrical fields (<1 MV/cm). Furthermore, the oxygen plasma treatment on the surface of as-deposited BaTa2O6 resulted in a lowering of the interface barrier height and thus, a reduction of the leakage current at Al under a negative bias. This can be explained by the formation of Ba-rich metallic layer by surface etching effect and by filling the oxygen vacancies in the bulk.
Original language | English |
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Pages (from-to) | 71-76 |
Number of pages | 6 |
Journal | IEEE Transactions on Electron Devices |
Volume | 47 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2000 Jan |
Bibliographical note
Funding Information:Manuscript received January 18, 1999; revised June 7, 1999. This work supported by the Ministry of Science and Technology in Korea. The review of this paper was arranged by Editor P. K. Bhattacharya. Y.-H. Lee, Y.-S. Kim, B.-K. Ju, and M.-H. Oh are with the Electronic Materials and Device Research Center, Korea Institute of Science and Technology, Cheongryang, Seoul, Korea (e-mail: [email protected]). D.-H. Kim is with the Department of Physics, Yeungnam University, Kyungsan, Korea. Publisher Item Identifier S 0018-9383(00)00521-9.
Keywords
- Conduction mechanism
- Dielectric thin films
- Optoelectronic display
- Sputtered films
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering