Conformal perovskite films on 100 cm2 textured silicon surface using two-step vacuum process

Jae Keun Hwang, Sang Won Lee, Wonkyu Lee, Soohyun Bae, Kyungjin Cho, Seongtak Kim, Solhee Lee, Ji Yeon Hyun, Yoonmook Kang, Hae Seok Lee, Donghwan Kim

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


In this study, perovskite thin films (PFs) were conformally deposited on 100 cm2 textured silicon substrates using a two-step vacuum process. The PFs were fabricated by converting thin films of a sputtered-PbO precursor using the chemical vapor deposition process. The conversion of PbO thin films into PFs was confirmed by X-ray diffractometry. The uniformity of reflectance and thickness was higher than 86% and 92%, respectively, on 100 cm2 textured substrate. We applied methylammonium vapor treatment for complete conversion without residual layer and the power conversion efficiency was 10.2% on a glass/FTO/TiO2/MAPbI3/Spiro-MeOTAD/Au structure.

Original languageEnglish
Article number137694
JournalThin Solid Films
Publication statusPublished - 2020 Jan 1


  • Chemical vapor deposition
  • Large area
  • Perovskite solar cells
  • Sputtering
  • Textured silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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