Conformal perovskite films on 100 cm2 textured silicon surface using two-step vacuum process

Jae Keun Hwang; Sang Won Lee; Wonkyu Lee; Soohyun Bae; Kyungjin Cho; Seongtak Kim; Solhee Lee; Ji Yeon Hyun; Yoonmook Kang; Hae Seok Lee; Donghwan Kim

doi:10.1016/j.tsf.2019.137694

Conformal perovskite films on 100 cm² textured silicon surface using two-step vacuum process

Jae Keun Hwang, Sang Won Lee, Wonkyu Lee, Soohyun Bae, Kyungjin Cho, Seongtak Kim, Solhee Lee, Ji Yeon Hyun, Yoonmook Kang, Hae Seok Lee, Donghwan Kim

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

In this study, perovskite thin films (PFs) were conformally deposited on 100 cm² textured silicon substrates using a two-step vacuum process. The PFs were fabricated by converting thin films of a sputtered-PbO precursor using the chemical vapor deposition process. The conversion of PbO thin films into PFs was confirmed by X-ray diffractometry. The uniformity of reflectance and thickness was higher than 86% and 92%, respectively, on 100 cm² textured substrate. We applied methylammonium vapor treatment for complete conversion without residual layer and the power conversion efficiency was 10.2% on a glass/FTO/TiO₂/MAPbI₃/Spiro-MeOTAD/Au structure.

Original language	English
Article number	137694
Journal	Thin Solid Films
Volume	693
DOIs	https://doi.org/10.1016/j.tsf.2019.137694
Publication status	Published - 2020 Jan 1

Bibliographical note

Funding Information:
This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (grant number 20173030014370 ); the Technology Development Program to Solve Climate Changes of the National Research Foundation (NRF) funded by the Ministry of Science and ICT (grant number 2017M1A2A2087351 ); the “Human Resources Program in Energy Technology” of the Korea Institute of Energy Technology Evaluation and Planning, with financial support from the Ministry of Trade, Industry and Energy , Republic of Korea (grant number 20154030200760 ). This work was also conducted under the framework of the Research and Development Program of the Korea Institute of Energy Research (KIER) (B9-2411).

Funding Information:
This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (grant number 20173030014370); the Technology Development Program to Solve Climate Changes of the National Research Foundation (NRF) funded by the Ministry of Science and ICT (grant number 2017M1A2A2087351); the “Human Resources Program in Energy Technology” of the Korea Institute of Energy Technology Evaluation and Planning, with financial support from the Ministry of Trade, Industry and Energy, Republic of Korea (grant number 20154030200760). This work was also conducted under the framework of the Research and Development Program of the Korea Institute of Energy Research (KIER) (B9-2411).

Publisher Copyright:
© 2019 Elsevier B.V.

Keywords

Chemical vapor deposition
Large area
Perovskite solar cells
Sputtering
Textured silicon

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2019.137694

Cite this

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title = "Conformal perovskite films on 100 cm2 textured silicon surface using two-step vacuum process",

abstract = "In this study, perovskite thin films (PFs) were conformally deposited on 100 cm2 textured silicon substrates using a two-step vacuum process. The PFs were fabricated by converting thin films of a sputtered-PbO precursor using the chemical vapor deposition process. The conversion of PbO thin films into PFs was confirmed by X-ray diffractometry. The uniformity of reflectance and thickness was higher than 86% and 92%, respectively, on 100 cm2 textured substrate. We applied methylammonium vapor treatment for complete conversion without residual layer and the power conversion efficiency was 10.2% on a glass/FTO/TiO2/MAPbI3/Spiro-MeOTAD/Au structure.",

keywords = "Chemical vapor deposition, Large area, Perovskite solar cells, Sputtering, Textured silicon",

author = "Hwang, {Jae Keun} and Lee, {Sang Won} and Wonkyu Lee and Soohyun Bae and Kyungjin Cho and Seongtak Kim and Solhee Lee and Hyun, {Ji Yeon} and Yoonmook Kang and Lee, {Hae Seok} and Donghwan Kim",

note = "Funding Information: This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (grant number 20173030014370 ); the Technology Development Program to Solve Climate Changes of the National Research Foundation (NRF) funded by the Ministry of Science and ICT (grant number 2017M1A2A2087351 ); the “Human Resources Program in Energy Technology” of the Korea Institute of Energy Technology Evaluation and Planning, with financial support from the Ministry of Trade, Industry and Energy , Republic of Korea (grant number 20154030200760 ). This work was also conducted under the framework of the Research and Development Program of the Korea Institute of Energy Research (KIER) (B9-2411). Funding Information: This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (grant number 20173030014370); the Technology Development Program to Solve Climate Changes of the National Research Foundation (NRF) funded by the Ministry of Science and ICT (grant number 2017M1A2A2087351); the “Human Resources Program in Energy Technology” of the Korea Institute of Energy Technology Evaluation and Planning, with financial support from the Ministry of Trade, Industry and Energy, Republic of Korea (grant number 20154030200760). This work was also conducted under the framework of the Research and Development Program of the Korea Institute of Energy Research (KIER) (B9-2411). Publisher Copyright: {\textcopyright} 2019 Elsevier B.V.",

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AU - Hwang, Jae Keun

AU - Lee, Sang Won

AU - Lee, Wonkyu

AU - Bae, Soohyun

AU - Cho, Kyungjin

AU - Kim, Seongtak

AU - Lee, Solhee

AU - Hyun, Ji Yeon

AU - Kang, Yoonmook

AU - Lee, Hae Seok

AU - Kim, Donghwan

N1 - Funding Information: This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (grant number 20173030014370 ); the Technology Development Program to Solve Climate Changes of the National Research Foundation (NRF) funded by the Ministry of Science and ICT (grant number 2017M1A2A2087351 ); the “Human Resources Program in Energy Technology” of the Korea Institute of Energy Technology Evaluation and Planning, with financial support from the Ministry of Trade, Industry and Energy , Republic of Korea (grant number 20154030200760 ). This work was also conducted under the framework of the Research and Development Program of the Korea Institute of Energy Research (KIER) (B9-2411). Funding Information: This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (grant number 20173030014370); the Technology Development Program to Solve Climate Changes of the National Research Foundation (NRF) funded by the Ministry of Science and ICT (grant number 2017M1A2A2087351); the “Human Resources Program in Energy Technology” of the Korea Institute of Energy Technology Evaluation and Planning, with financial support from the Ministry of Trade, Industry and Energy, Republic of Korea (grant number 20154030200760). This work was also conducted under the framework of the Research and Development Program of the Korea Institute of Energy Research (KIER) (B9-2411). Publisher Copyright: © 2019 Elsevier B.V.

PY - 2020/1/1

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N2 - In this study, perovskite thin films (PFs) were conformally deposited on 100 cm2 textured silicon substrates using a two-step vacuum process. The PFs were fabricated by converting thin films of a sputtered-PbO precursor using the chemical vapor deposition process. The conversion of PbO thin films into PFs was confirmed by X-ray diffractometry. The uniformity of reflectance and thickness was higher than 86% and 92%, respectively, on 100 cm2 textured substrate. We applied methylammonium vapor treatment for complete conversion without residual layer and the power conversion efficiency was 10.2% on a glass/FTO/TiO2/MAPbI3/Spiro-MeOTAD/Au structure.

AB - In this study, perovskite thin films (PFs) were conformally deposited on 100 cm2 textured silicon substrates using a two-step vacuum process. The PFs were fabricated by converting thin films of a sputtered-PbO precursor using the chemical vapor deposition process. The conversion of PbO thin films into PFs was confirmed by X-ray diffractometry. The uniformity of reflectance and thickness was higher than 86% and 92%, respectively, on 100 cm2 textured substrate. We applied methylammonium vapor treatment for complete conversion without residual layer and the power conversion efficiency was 10.2% on a glass/FTO/TiO2/MAPbI3/Spiro-MeOTAD/Au structure.

KW - Chemical vapor deposition

KW - Large area

KW - Perovskite solar cells

KW - Sputtering

KW - Textured silicon

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