Control of the initial growth in atomic layer deposition of Pt films by surface pretreatment

Jung Joon Pyeon, Cheol Jin Cho, Seung Hyub Baek, Chong Yun Kang, Jin Sang Kim, Doo Seok Jeong, Seong Keun Kim

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    24 Citations (Scopus)

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    Keyphrases

    Material Science

    Chemical Engineering

    Engineering