Abstract
A procedure was demonstrated for fabricating multiwall (MW) anatase titanium dioxide (TiO 2) nano tubes (NT) using templated atomic layer deposition (ALD) synthesis along with alternating TiO 2 and Al 2O 3 nanolaminate structures. It was demonstrated that significantly increased specific surface area and and an improved surface roughness factor were achieved through the proposed strategy. Porous alumina membranes housing cylindrical pores were used as a template, while TiO 2 and Al 2O 3 nanolaminate layers were deposited onto the template through ALD. It was also observed that titanium(IV) iso-peroxide and trimethyl aluminum were used as metal reactants, while water vapor and argon (Ar) were used as an oxidant and a carrier gas to conduct the investigations.
Original language | English |
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Pages (from-to) | 2574-2576 |
Number of pages | 3 |
Journal | Chemistry of Materials |
Volume | 21 |
Issue number | 13 |
DOIs | |
Publication status | Published - 2009 Jul 14 |
Externally published | Yes |
ASJC Scopus subject areas
- General Chemistry
- General Chemical Engineering
- Materials Chemistry