Crystal orientation dependence of deep level spectra in proton irradiated bulk β-Ga₂O₃

A. Y. Polyakov, N. B. Smirnov, I. V. Shchemerov, A. A. Vasilev, A. I. Kochkova, A. V. Chernykh, P. B. Lagov, Yu S. Pavlov, V. S. Stolbunov, T. V. Kulevoy, I. V. Borzykh, In Hwan Lee, Fan Ren, S. J. Pearton