DC 마그네트론 스퍼터링에서 입방정 질화붕소 박막의 증착 거동에 미치는 이온 플럭스 변화의 영향

Translated title of the contribution: Effect of Ion Flux Variation in DC Magnetron Sputtering on the Deposition of Cubic Boron Nitride Film

Young Hwan Choi, Joo Youl Huh, Young Joon Baik

    Research output: Contribution to journal › Article › peer-review

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    Keyphrases

    Material Science

    Chemical Engineering