Abstract
Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).
Original language | English |
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Pages (from-to) | 933-935 |
Number of pages | 3 |
Journal | Journal of Electroceramics |
Volume | 17 |
Issue number | 2-4 |
DOIs | |
Publication status | Published - 2006 Dec |
Keywords
- Ferroelectric
- LiNbO
- PLD
- Selective etching
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Mechanics of Materials
- Electrical and Electronic Engineering
- Materials Chemistry