Abstract
A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes, the movable electrode is pulled by an electrostatic force between the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 μm-thick poly-Si and the measured threshold voltage for ON/OFF switching was 23 V.
Original language | English |
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Pages (from-to) | 508-514 |
Number of pages | 7 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4174 |
DOIs | |
Publication status | Published - 2000 |
Event | Micromachining and Microfabrication Process Technology VI - Santa Clara, CA, USA Duration: 2000 Dec 18 → 2000 Dec 20 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering