Design and fabrication of a micromechanical inverter

Kyoung Soo Chae; Seungoh Han; Minseok Song; Sung Moon; James Jungho Pak

doi:10.1117/12.396471

Design and fabrication of a micromechanical inverter

Kyoung Soo Chae, Seungoh Han, Minseok Song, Sung Moon, James Jungho Pak

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes, the movable electrode is pulled by an electrostatic force between the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 μm-thick poly-Si and the measured threshold voltage for ON/OFF switching was 23 V.

Original language	English
Pages (from-to)	508-514
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4174
DOIs	https://doi.org/10.1117/12.396471
Publication status	Published - 2000
Event	Micromachining and Microfabrication Process Technology VI - Santa Clara, CA, USA Duration: 2000 Dec 18 → 2000 Dec 20

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "Design and fabrication of a micromechanical inverter",

abstract = "A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes, the movable electrode is pulled by an electrostatic force between the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 μm-thick poly-Si and the measured threshold voltage for ON/OFF switching was 23 V.",

author = "Chae, {Kyoung Soo} and Seungoh Han and Minseok Song and Sung Moon and Pak, {James Jungho}",

year = "2000",

doi = "10.1117/12.396471",

language = "English",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - JOUR

T1 - Design and fabrication of a micromechanical inverter

AU - Chae, Kyoung Soo

AU - Han, Seungoh

AU - Song, Minseok

AU - Moon, Sung

AU - Pak, James Jungho

PY - 2000

Y1 - 2000

N2 - A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes, the movable electrode is pulled by an electrostatic force between the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 μm-thick poly-Si and the measured threshold voltage for ON/OFF switching was 23 V.

AB - A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes, the movable electrode is pulled by an electrostatic force between the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 μm-thick poly-Si and the measured threshold voltage for ON/OFF switching was 23 V.

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VL - 4174

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EP - 514

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Micromachining and Microfabrication Process Technology VI

Y2 - 18 December 2000 through 20 December 2000

ER -

Design and fabrication of a micromechanical inverter

Abstract

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