@inproceedings{43738e38729f4b57a89e9c967798b859,
title = "Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors",
abstract = "A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo- mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2and gold thin-film layers. A simplified analytical model has been built to optimize the performance 3f micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code.",
keywords = "Bimorph thermal actuator, MEMS fabrication, Micromirror, Twisting actuation",
author = "Kim, {Dong Hyun} and Seungho Park and Ohmyoung Kwon and Choi, {Young Ki} and Lee, {Joon Sik}",
year = "2010",
doi = "10.1115/MNHMT2009-18038",
language = "English",
isbn = "9780791843895",
series = "Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009",
pages = "373--375",
booktitle = "Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009",
note = "ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 ; Conference date: 18-12-2009 Through 21-12-2009",
}