Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors

Dong Hyun Kim; Seungho Park; Ohmyoung Kwon; Young Ki Choi; Joon Sik Lee

doi:10.1115/MNHMT2009-18038

Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors

Dong Hyun Kim, Seungho Park, Ohmyoung Kwon, Young Ki Choi, Joon Sik Lee

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo- mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO₂and gold thin-film layers. A simplified analytical model has been built to optimize the performance 3f micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code.

Original language	English
Title of host publication	Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Pages	373-375
Number of pages	3
DOIs	https://doi.org/10.1115/MNHMT2009-18038
Publication status	Published - 2010
Event	ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 - Shanghai, China Duration: 2009 Dec 18 → 2009 Dec 21

Publication series

Name	Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Volume	2

Other

Other	ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Country/Territory	China
City	Shanghai
Period	09/12/18 → 09/12/21

Keywords

Bimorph thermal actuator
MEMS fabrication
Micromirror
Twisting actuation

ASJC Scopus subject areas

Fluid Flow and Transfer Processes

Access to Document

10.1115/MNHMT2009-18038

Cite this

Kim, D. H., Park, S., Kwon, O., Choi, Y. K., & Lee, J. S. (2010). Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors. In Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 (pp. 373-375). (Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009; Vol. 2). https://doi.org/10.1115/MNHMT2009-18038

Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors. / Kim, Dong Hyun; Park, Seungho; Kwon, Ohmyoung et al.
Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. 2010. p. 373-375 (Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kim, DH, Park, S, Kwon, O, Choi, YK & Lee, JS 2010, Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors. in Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009, vol. 2, pp. 373-375, ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009, Shanghai, China, 09/12/18. https://doi.org/10.1115/MNHMT2009-18038

Kim DH, Park S, Kwon O, Choi YK, Lee JS. Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors. In Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. 2010. p. 373-375. (Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009). doi: 10.1115/MNHMT2009-18038

Kim, Dong Hyun ; Park, Seungho ; Kwon, Ohmyoung et al. / Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors. Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. 2010. pp. 373-375 (Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009).

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Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors

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