Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip

Si Jong Kim; Hong Joo Song; Jun Ho Lee; Cheong Hyun Roh; Hong Goo Choi; Cheol Koo Hahn; Tae Geun Kim

doi:10.1109/OMEMS.2009.5338535

Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip

Si Jong Kim, Hong Joo Song, Jun Ho Lee, Cheong Hyun Roh, Hong Goo Choi, Cheol Koo Hahn, Tae Geun Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Monolithic integrated optical array sensor is designed and fabricated. This array sensor is composed of vertical-cavity surface-emitting laser (VCSEL) and resonant cavity enhanced (RCE) photodiode. After the single chip is packaged, VCSEL and RCE photodiode are characterized independently. The VCSEL's optical power of 0.3mW is achieved at 30mA with peak wavelength of 781nm. The full width at half-maximum (FWHM) of 1nm is achieved at 30mA. The RCE photodiode's responsivity of 0.92A/W is achieved at 780nm.

Original language	English
Title of host publication	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages	109-110
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2009.5338535
Publication status	Published - 2009
Event	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: 2009 Aug 17 → 2009 Aug 20

Publication series

Name	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/Territory	United States
City	Clearwater, FL
Period	09/8/17 → 09/8/20

Keywords

Fluorescence detection
Monolithic integrated optical sensor
Optical array sensor

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2009.5338535

Cite this

Kim, S. J., Song, H. J., Lee, J. H., Roh, C. H., Choi, H. G., Hahn, C. K., & Kim, T. G. (2009). Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 109-110). Article 5338535 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). https://doi.org/10.1109/OMEMS.2009.5338535

Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip. / Kim, Si Jong; Song, Hong Joo; Lee, Jun Ho et al.
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 109-110 5338535 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kim, SJ, Song, HJ, Lee, JH, Roh, CH, Choi, HG, Hahn, CK & Kim, TG 2009, Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338535, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, pp. 109-110, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 09/8/17. https://doi.org/10.1109/OMEMS.2009.5338535

Kim SJ, Song HJ, Lee JH, Roh CH, Choi HG, Hahn CK et al. Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 109-110. 5338535. (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). doi: 10.1109/OMEMS.2009.5338535

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title = "Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip",

abstract = "Monolithic integrated optical array sensor is designed and fabricated. This array sensor is composed of vertical-cavity surface-emitting laser (VCSEL) and resonant cavity enhanced (RCE) photodiode. After the single chip is packaged, VCSEL and RCE photodiode are characterized independently. The VCSEL's optical power of 0.3mW is achieved at 30mA with peak wavelength of 781nm. The full width at half-maximum (FWHM) of 1nm is achieved at 30mA. The RCE photodiode's responsivity of 0.92A/W is achieved at 780nm.",

keywords = "Fluorescence detection, Monolithic integrated optical sensor, Optical array sensor",

author = "Kim, {Si Jong} and Song, {Hong Joo} and Lee, {Jun Ho} and Roh, {Cheong Hyun} and Choi, {Hong Goo} and Hahn, {Cheol Koo} and Kim, {Tae Geun}",

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doi = "10.1109/OMEMS.2009.5338535",

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AU - Kim, Si Jong

AU - Song, Hong Joo

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AU - Roh, Cheong Hyun

AU - Choi, Hong Goo

AU - Hahn, Cheol Koo

AU - Kim, Tae Geun

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AB - Monolithic integrated optical array sensor is designed and fabricated. This array sensor is composed of vertical-cavity surface-emitting laser (VCSEL) and resonant cavity enhanced (RCE) photodiode. After the single chip is packaged, VCSEL and RCE photodiode are characterized independently. The VCSEL's optical power of 0.3mW is achieved at 30mA with peak wavelength of 781nm. The full width at half-maximum (FWHM) of 1nm is achieved at 30mA. The RCE photodiode's responsivity of 0.92A/W is achieved at 780nm.

KW - Fluorescence detection

KW - Monolithic integrated optical sensor

KW - Optical array sensor

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Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip

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