Design of vertical type probe tip using finite element analysis

Young Ryun Oh; Yun Jae Kim; Hyun Suk Nam; Ung Gi Park; Hak Joo Lee; Jung Yub Kim; Jun Hyub Park

doi:10.3795/KSME-A.2012.36.8.851

Design of vertical type probe tip using finite element analysis

Young Ryun Oh, Yun Jae Kim, Hyun Suk Nam, Ung Gi Park, Hak Joo Lee, Jung Yub Kim, Jun Hyub Park

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process . A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and 100 μm(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1̃2 gf(Contact Force) and 100 μμm(Over drive).

Original language	English
Pages (from-to)	851-856
Number of pages	6
Journal	Transactions of the Korean Society of Mechanical Engineers, A
Volume	36
Issue number	8
DOIs	https://doi.org/10.3795/KSME-A.2012.36.8.851
Publication status	Published - 2012 Aug

Keywords

FE analysis
MEMS process
Probe test
Probe tip

ASJC Scopus subject areas

Mechanical Engineering

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10.3795/KSME-A.2012.36.8.851

Cite this

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title = "Design of vertical type probe tip using finite element analysis",

abstract = "The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process . A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and 100 μm(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are {\~1}2 gf(Contact Force) and 100 μμm(Over drive).",

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AU - Oh, Young Ryun

AU - Kim, Yun Jae

AU - Nam, Hyun Suk

AU - Park, Ung Gi

AU - Lee, Hak Joo

AU - Kim, Jung Yub

AU - Park, Jun Hyub

PY - 2012/8

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AB - The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process . A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and 100 μm(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1̃2 gf(Contact Force) and 100 μμm(Over drive).

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KW - MEMS process

KW - Probe test

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Design of vertical type probe tip using finite element analysis

Abstract

Keywords

ASJC Scopus subject areas

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