Design of vertical type probe tip using finite element analysis

Young Ryun Oh, Yun Jae Kim, Hyun Suk Nam, Ung Gi Park, Hak Joo Lee, Jung Yub Kim, Jun Hyub Park

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process . A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and 100 μm(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1̃2 gf(Contact Force) and 100 μμm(Over drive).

    Original languageEnglish
    Pages (from-to)851-856
    Number of pages6
    JournalTransactions of the Korean Society of Mechanical Engineers, A
    Volume36
    Issue number8
    DOIs
    Publication statusPublished - 2012 Aug

    Keywords

    • FE analysis
    • MEMS process
    • Probe test
    • Probe tip

    ASJC Scopus subject areas

    • Mechanical Engineering

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