Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers

Dong Won Chun, Kyo Seon Hwang, Kilho Eom, Jeong Hoon Lee, Byung Hak Cha, Woo Young Lee, Dae Sung Yoon, Tae Song Kim

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)


Through the use of oscillating microcantilevers, a micromechanical mass detection with a resolution of a Hz per picogram regime is reported. Through MEMS processes, piezoelectric microcantilevers that are simultaneously capable of self-actuation and the electrical measurement of resonant frequencies were fabricated. Mass detection in the Hz per picogram regime is demonstrated with a deposition of an Au thin-layer, of which the thickness is precisely controlled. In addition, it is shown that a scaling down of the microcantilevers enhances the sensitivity during the micromechanical mass detection.

Original languageEnglish
Pages (from-to)857-862
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - 2007 Apr 15
Externally publishedYes

Bibliographical note

Funding Information:
Kilho Eom earned PhD degree in Department of Aerospace Engineering & Engineering Mechanics (ASEEM) in the University of Texas at Austin (UT Austin). During his PhD works (2000–2005), his research regarding coarse-grained modeling of proteins was supported by Department of ASEEM, Institute of Computational Engineering and Science (ICES), Institute for Theoretical Chemistry (ITC), and Department of Chemistry in UT Austin as an interdisciplinary research. After earning PhD degree in August 2005, he joined to Microsystem Research Center in Korea Institute of Science and Technology (KIST) as a research scientist. He is currently involved in the research project regarding a microcantilever-based biosensor for a label-free detection of biomolecules. Moreover, he is also involved in the computational modeling of protein molecules based on statistical physics theory. His current research interest is the theoretical model study on nanomechanics of bio-MEMS and biological macromolecules (DNA, protein).

Funding Information:
The authors are very grateful for the financial support from the Intelligent Microsystem Center sponsored by the Korea Ministry of Science and Technology as a part of the Twenty-first Century Frontiers R&D Project (Grant MS-01-133-01), and from the National Core Research Center for Nanomedical Technology sponsored by KOSEF (Grant R15-2004-024-00000-0). D.W.C. would like to appreciate Dr. Jongin Hong (Korea Institute of Science and Technology) and WooYoung Shim and DoHun Kim (Yonsei University) for helpful discussions.


  • Analytical sensitivity
  • Microcantilever
  • Micromechanical mass detection
  • Resonant frequency

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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