Development of a metrology frame to improve the positioning accuracy of Micro/Meso-scale Machine Tools

Shawn Moylan; Daehie Hong; Bradley N. Damazo; Johannes Soons; Alkan Donmez

doi:10.1504/ijmms.2009.028083

Development of a metrology frame to improve the positioning accuracy of Micro/Meso-scale Machine Tools

Shawn Moylan^*
, Daehie Hong
, Bradley N. Damazo
, Johannes Soons
, Alkan Donmez

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The small work volumes of Micro/Meso-scale Machine Tools (MMMTs) often present problems for calibration and error compensation, but also allow solutions not practical on the traditional scale. Measuring tool position with a separate metrology frame and compensating for error motions is one such solution. The metrology frame design follows principles of precision design and allows measurement of the position of the tool tip with respect to the workpiece while minimising Abbe errors. Kinematic analysis provides the relationship between metrology frame measurements and machine tool coordinates. Error analysis reveals that sensor error has the only first order influence on measurement accuracy.

Original language	English
Pages (from-to)	600-619
Number of pages	20
Journal	International Journal of Mechatronics and Manufacturing Systems
Volume	2
Issue number	5-6
DOIs	https://doi.org/10.1504/ijmms.2009.028083
Publication status	Published - 2009 Sept

Keywords

Abbe alignment principle
Abbe offset errors
Kinematic design
Metrology frame
Micro/meso-scale machine tools
Micromanufacturing
Mmmts

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1504/ijmms.2009.028083

Cite this

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title = "Development of a metrology frame to improve the positioning accuracy of Micro/Meso-scale Machine Tools",

abstract = "The small work volumes of Micro/Meso-scale Machine Tools (MMMTs) often present problems for calibration and error compensation, but also allow solutions not practical on the traditional scale. Measuring tool position with a separate metrology frame and compensating for error motions is one such solution. The metrology frame design follows principles of precision design and allows measurement of the position of the tool tip with respect to the workpiece while minimising Abbe errors. Kinematic analysis provides the relationship between metrology frame measurements and machine tool coordinates. Error analysis reveals that sensor error has the only first order influence on measurement accuracy.",

keywords = "Abbe alignment principle, Abbe offset errors, Kinematic design, Metrology frame, Micro/meso-scale machine tools, Micromanufacturing, Mmmts",

author = "Shawn Moylan and Daehie Hong and Damazo, \{Bradley N.\} and Johannes Soons and Alkan Donmez",

year = "2009",

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doi = "10.1504/ijmms.2009.028083",

language = "English",

volume = "2",

pages = "600--619",

journal = "International Journal of Mechatronics and Manufacturing Systems",

issn = "1753-1039",

publisher = "Inderscience Enterprises Ltd",

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T1 - Development of a metrology frame to improve the positioning accuracy of Micro/Meso-scale Machine Tools

AU - Moylan, Shawn

AU - Hong, Daehie

AU - Damazo, Bradley N.

AU - Soons, Johannes

AU - Donmez, Alkan

PY - 2009/9

Y1 - 2009/9

N2 - The small work volumes of Micro/Meso-scale Machine Tools (MMMTs) often present problems for calibration and error compensation, but also allow solutions not practical on the traditional scale. Measuring tool position with a separate metrology frame and compensating for error motions is one such solution. The metrology frame design follows principles of precision design and allows measurement of the position of the tool tip with respect to the workpiece while minimising Abbe errors. Kinematic analysis provides the relationship between metrology frame measurements and machine tool coordinates. Error analysis reveals that sensor error has the only first order influence on measurement accuracy.

AB - The small work volumes of Micro/Meso-scale Machine Tools (MMMTs) often present problems for calibration and error compensation, but also allow solutions not practical on the traditional scale. Measuring tool position with a separate metrology frame and compensating for error motions is one such solution. The metrology frame design follows principles of precision design and allows measurement of the position of the tool tip with respect to the workpiece while minimising Abbe errors. Kinematic analysis provides the relationship between metrology frame measurements and machine tool coordinates. Error analysis reveals that sensor error has the only first order influence on measurement accuracy.

KW - Abbe alignment principle

KW - Abbe offset errors

KW - Kinematic design

KW - Metrology frame

KW - Micro/meso-scale machine tools

KW - Micromanufacturing

KW - Mmmts

UR - https://www.scopus.com/pages/publications/70349197969

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M3 - Article

AN - SCOPUS:70349197969

SN - 1753-1039

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SP - 600

EP - 619

JO - International Journal of Mechatronics and Manufacturing Systems

JF - International Journal of Mechatronics and Manufacturing Systems

IS - 5-6

ER -

Development of a metrology frame to improve the positioning accuracy of Micro/Meso-scale Machine Tools

Abstract

Keywords

ASJC Scopus subject areas

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