TY - GEN
T1 - Development of automatic process control system with simulation in PECVD system
AU - Kim, Youn Jin
AU - Lee, Hong Chul
PY - 2008
Y1 - 2008
N2 - We develop the Automatic Process Control system to maximize the number of available process chambers by controlling the time to start cleaning each chamber. Firstly, to achieve the purpose we build the controller model which creates and changes the pseudo RPSC counter properly by controlling other factors: unit priority, robot sequence etc. Secondly, for testing the control system we design one of the representative PECVD systems, and experiment the simulated system with the APC system and without it under various conditions. Finally, we optimize the system with the Evolution Strategy. As a result, not only major performance indicators; cycle time and throughput but also the variations of them have improved than before adapting the system. The contribution of this research is to present the practical solution concerned with various and complex issues in the real world.
AB - We develop the Automatic Process Control system to maximize the number of available process chambers by controlling the time to start cleaning each chamber. Firstly, to achieve the purpose we build the controller model which creates and changes the pseudo RPSC counter properly by controlling other factors: unit priority, robot sequence etc. Secondly, for testing the control system we design one of the representative PECVD systems, and experiment the simulated system with the APC system and without it under various conditions. Finally, we optimize the system with the Evolution Strategy. As a result, not only major performance indicators; cycle time and throughput but also the variations of them have improved than before adapting the system. The contribution of this research is to present the practical solution concerned with various and complex issues in the real world.
KW - Automatic Process Control(APC)
KW - PECVD
KW - RPSC
KW - Simulation
KW - TFT-LCD
UR - http://www.scopus.com/inward/record.url?scp=58149099094&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=58149099094&partnerID=8YFLogxK
U2 - 10.1109/ICCAS.2008.4694375
DO - 10.1109/ICCAS.2008.4694375
M3 - Conference contribution
AN - SCOPUS:58149099094
SN - 9788995003893
T3 - 2008 International Conference on Control, Automation and Systems, ICCAS 2008
SP - 1475
EP - 1478
BT - 2008 International Conference on Control, Automation and Systems, ICCAS 2008
T2 - 2008 International Conference on Control, Automation and Systems, ICCAS 2008
Y2 - 14 October 2008 through 17 October 2008
ER -