Abstract
Transmission electron diffraction (TED) and transmission electron microscope (TEM) studies have been made of organometallic vapor phase epitaxial GaxIn1-xP layers (x ≈ 0.5) grown at temperatures in the range 570-690°C to investigate ordering and ordered domain structures. TED and TEM examination shows that the size and morphology of ordered domains depend on the growth temperature. The ordered domains change from a fine rod-like shape to a plate-like shape as the growth temperature increases. The domains are of width 0.6∼2 nm and of length 1∼10 nm. Characteristic diffuse features observed in TED patterns are found to depend on the growth temperature. Extensive computer simulations show a direct correlation between the ordered domain structures and such diffuse features. A possible model is suggested to describe the temperature dependence of the ordered domain structure.
Original language | English |
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Pages (from-to) | 1117-1123 |
Number of pages | 7 |
Journal | Journal of Electronic Materials |
Volume | 27 |
Issue number | 10 |
DOIs | |
Publication status | Published - 1998 Oct |
Externally published | Yes |
Keywords
- GaInP
- Ordering
- Organometallic vapor phase epitaxy (OMVPE)
- Transmission electron diffraction (TED)
- Transmission electron microscopy (TEM)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry