Direct comparison of the electrical properties in metal/oxide/nitride/oxide/silicon and metal/aluminum oxide/nitride/oxide/silicon capacitors with equivalent oxide thicknesses
- Ho Myoung An
- , Yu Jeong Seo
- , Hee Dong Kim
- , Kyoung Chan Kim
- , Jong Guk Kim
- , Won Ju Cho
- , Jung Hyuk Koh
- , Yun Mo Sung
- , Tae Geun Kim*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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