Direct formation of nanocrystalline silicon by electron cyclotron resonance chemical vapor deposition
- Won Chel Choi
- , Eun Kyu Kim*
- , Suk Ki Min
- , Chong Yun Park
- , Joon Hyung Kim
- , Tae Yeon Seong
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
24
Link opens in a new tab
Citations
(Scopus)