Direct formation of nanocrystalline silicon by electron cyclotron resonance chemical vapor deposition

  • Won Chel Choi
  • , Eun Kyu Kim*
  • , Suk Ki Min
  • , Chong Yun Park
  • , Joon Hyung Kim
  • , Tae Yeon Seong
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

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Material Science