Direct Measurement of Ion Diffusivity in Oxide Thin Film by Using Isotope Tracers and Secondary Ion Mass Spectrometry

Kiho Bae, Dong Young Jang, Joong Sun Park, Ji Won Son, Fritz B. Prinz, Joon Hyung Shim

Research output: Contribution to journalArticlepeer-review


Diffusion of oxide ions along heterostructured yttria-stabilized zirconia (YSZ) epitaxially grown on single crystalline MgO (001) is investigated. Pulsed laser deposition is used for the epitaxial growth and focused ion beam was applied to open the lateral surface of the YSZ-MgO interface layers and to enable incorporation and diffusion of oxygen. The sample is annealed in 18O2 environment to trace oxide ion transport with Al2O3 layers atop to block diffusion perpendicular to surface of the YSZ plane. Time-of-flight secondary mass ion spectrometry (TOF–SIMS) analyze the planar diffusion profiles. Diffusivity and surface exchange rate are estimated by SIMS data fitting. As a result, it is identified that both oxide ion diffusion and surface incorporation rates are significantly enhanced on surface of the heterostructured YSZ on MgO (001) compared to bulk YSZ.

Original languageEnglish
Pages (from-to)405-410
Number of pages6
JournalInternational Journal of Precision Engineering and Manufacturing - Green Technology
Issue number2
Publication statusPublished - 2020 Mar 1

Bibliographical note

Publisher Copyright:
© 2019, Korean Society for Precision Engineering.


  • Heterostructure
  • Ion diffusion
  • Isotope tracer
  • Stain effect
  • Surface exchange
  • Yttria-stabilized zirconia

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • General Materials Science
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Management of Technology and Innovation


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