Direct-write nanolighography on flexible substrate

Jiyoung Chang; Michael Dommer; Byung Yang Lee; Liwei Lin

Direct-write nanolighography on flexible substrate

Jiyoung Chang, Michael Dommer, Byung Yang Lee, Liwei Lin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a mask-less lithography process using direct-write nanofibers via near-field electrospinning on flexible substrate as masking materials in processes such as lift-off, wet-etching and dry-etching. The polymer fibers have diameter of sub-micrometer to micrometer with good adhesion to substrate and chemical sustainability. Key demonstrations successfully realized in this work include sub-micrometer metal gaps, micro heaters and definition of graphene structures on flexible substrates. As such, this direct-write lithography technique could find applications in low-cost microelectronics, including flexible electronics.

Original language	English
Title of host publication	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
Publisher	Transducer Research Foundation
Pages	441-444
Number of pages	4
ISBN (Print)	9780964002494
Publication status	Published - 2012
Externally published	Yes
Event	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States Duration: 2012 Jun 3 → 2012 Jun 7

Other

Other	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Country/Territory	United States
City	Hilton Head
Period	12/6/3 → 12/6/7

Keywords

Electrospinning
Flexible electronics
Mask-less lithography

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Cite this

@inproceedings{7c71b976030e476d99c5674c9550e99c,

title = "Direct-write nanolighography on flexible substrate",

abstract = "This paper presents a mask-less lithography process using direct-write nanofibers via near-field electrospinning on flexible substrate as masking materials in processes such as lift-off, wet-etching and dry-etching. The polymer fibers have diameter of sub-micrometer to micrometer with good adhesion to substrate and chemical sustainability. Key demonstrations successfully realized in this work include sub-micrometer metal gaps, micro heaters and definition of graphene structures on flexible substrates. As such, this direct-write lithography technique could find applications in low-cost microelectronics, including flexible electronics.",

keywords = "Electrospinning, Flexible electronics, Mask-less lithography",

author = "Jiyoung Chang and Michael Dommer and Lee, {Byung Yang} and Liwei Lin",

year = "2012",

language = "English",

isbn = "9780964002494",

pages = "441--444",

booktitle = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",

publisher = "Transducer Research Foundation",

note = "2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 ; Conference date: 03-06-2012 Through 07-06-2012",

}

TY - GEN

T1 - Direct-write nanolighography on flexible substrate

AU - Chang, Jiyoung

AU - Dommer, Michael

AU - Lee, Byung Yang

AU - Lin, Liwei

PY - 2012

Y1 - 2012

N2 - This paper presents a mask-less lithography process using direct-write nanofibers via near-field electrospinning on flexible substrate as masking materials in processes such as lift-off, wet-etching and dry-etching. The polymer fibers have diameter of sub-micrometer to micrometer with good adhesion to substrate and chemical sustainability. Key demonstrations successfully realized in this work include sub-micrometer metal gaps, micro heaters and definition of graphene structures on flexible substrates. As such, this direct-write lithography technique could find applications in low-cost microelectronics, including flexible electronics.

AB - This paper presents a mask-less lithography process using direct-write nanofibers via near-field electrospinning on flexible substrate as masking materials in processes such as lift-off, wet-etching and dry-etching. The polymer fibers have diameter of sub-micrometer to micrometer with good adhesion to substrate and chemical sustainability. Key demonstrations successfully realized in this work include sub-micrometer metal gaps, micro heaters and definition of graphene structures on flexible substrates. As such, this direct-write lithography technique could find applications in low-cost microelectronics, including flexible electronics.

KW - Electrospinning

KW - Flexible electronics

KW - Mask-less lithography

UR - http://www.scopus.com/inward/record.url?scp=84944681087&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84944681087&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84944681087

SN - 9780964002494

SP - 441

EP - 444

BT - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

PB - Transducer Research Foundation

T2 - 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012

Y2 - 3 June 2012 through 7 June 2012

ER -

Direct-write nanolighography on flexible substrate

Abstract

Other

Keywords

ASJC Scopus subject areas

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