Directed Self-Assembly of Cylinder-Forming Block Copolymers Using Pillar Topographic Patterns

We conducted a computational study on the self-assembly behavior of cylinder-forming block copolymers, directed by a guide pattern of hexagonally or tetragonally arrayed pillars, using mesoscale density functional theory simulations. By adjusting the spacing ( (Formula presented.) ) and diameter (D) of the pillars in relation to the intrinsic cylinder-to-cylinder distance ( (Formula presented.) ) of the cylinder-forming block copolymer, we investigated the efficiency of multiple-replicating cylinders, generated by the block copolymer, through the pillar-directed self-assembly process. The simulations demonstrated that at specific values of normalized parameters (Formula presented.) and (Formula presented.) coupled with suitable surface fields, triple and quadruple replications are achievable with a hexagonally arrayed pillar pattern, while only double replication is attainable with a tetragonally arrayed pillar pattern. This work, offering an extensive structure map encompassing a wide range of possible parameter spaces, including (Formula presented.) and (Formula presented.), serves as a valuable guide for designing the contact hole patterning essential in nanoelectronics applications.