Economic analysis of waste recycle process in perhydropolysiloxazane synthesis

Huichan Yun; Seungjong Yeom; Dae Ryook Yang

doi:10.1007/s11814-013-0268-4

Economic analysis of waste recycle process in perhydropolysiloxazane synthesis

Huichan Yun, Seungjong Yeom, Dae Ryook Yang

Department of Chemical and Biological Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The perhydropolysiloxazane (PHPS) solution has been widely used in the spin-on-dielectric (SOD) process to form silicon oxide layer on a wafer in semiconductor industries. To reduce the whole semiconductor manufacturing cost, the process of PHPS solution production requires high productivity as well as low production cost. A large portion of the PHPS solution production cost is attributed to the large usage of solvents (pyridine and xylene), because more than 20 times of solvents in mass are required to produce a unit mass of high purity PHPS solution. Therefore, we suggest several plausible solvent regeneration processes of organic solvent waste from the PHPS solution production, and their economics is evaluated for comparison.

Original language	English
Pages (from-to)	748-753
Number of pages	6
Journal	Korean Journal of Chemical Engineering
Volume	31
Issue number	5
DOIs	https://doi.org/10.1007/s11814-013-0268-4
Publication status	Published - 2014 May

Keywords

Economic Analysis
Perhydropolysiloxazane
Pyridine
Recycle

ASJC Scopus subject areas

Chemistry(all)
Chemical Engineering(all)

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10.1007/s11814-013-0268-4

Cite this

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title = "Economic analysis of waste recycle process in perhydropolysiloxazane synthesis",

abstract = "The perhydropolysiloxazane (PHPS) solution has been widely used in the spin-on-dielectric (SOD) process to form silicon oxide layer on a wafer in semiconductor industries. To reduce the whole semiconductor manufacturing cost, the process of PHPS solution production requires high productivity as well as low production cost. A large portion of the PHPS solution production cost is attributed to the large usage of solvents (pyridine and xylene), because more than 20 times of solvents in mass are required to produce a unit mass of high purity PHPS solution. Therefore, we suggest several plausible solvent regeneration processes of organic solvent waste from the PHPS solution production, and their economics is evaluated for comparison.",

keywords = "Economic Analysis, Perhydropolysiloxazane, Pyridine, Recycle",

author = "Huichan Yun and Seungjong Yeom and Yang, {Dae Ryook}",

note = "Funding Information: This work was supported by the Human Resources Development program (No. 20134010200600) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Trade, Industry and Energy.",

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doi = "10.1007/s11814-013-0268-4",

language = "English",

volume = "31",

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T1 - Economic analysis of waste recycle process in perhydropolysiloxazane synthesis

AU - Yun, Huichan

AU - Yeom, Seungjong

AU - Yang, Dae Ryook

N1 - Funding Information: This work was supported by the Human Resources Development program (No. 20134010200600) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Trade, Industry and Energy.

PY - 2014/5

Y1 - 2014/5

N2 - The perhydropolysiloxazane (PHPS) solution has been widely used in the spin-on-dielectric (SOD) process to form silicon oxide layer on a wafer in semiconductor industries. To reduce the whole semiconductor manufacturing cost, the process of PHPS solution production requires high productivity as well as low production cost. A large portion of the PHPS solution production cost is attributed to the large usage of solvents (pyridine and xylene), because more than 20 times of solvents in mass are required to produce a unit mass of high purity PHPS solution. Therefore, we suggest several plausible solvent regeneration processes of organic solvent waste from the PHPS solution production, and their economics is evaluated for comparison.

AB - The perhydropolysiloxazane (PHPS) solution has been widely used in the spin-on-dielectric (SOD) process to form silicon oxide layer on a wafer in semiconductor industries. To reduce the whole semiconductor manufacturing cost, the process of PHPS solution production requires high productivity as well as low production cost. A large portion of the PHPS solution production cost is attributed to the large usage of solvents (pyridine and xylene), because more than 20 times of solvents in mass are required to produce a unit mass of high purity PHPS solution. Therefore, we suggest several plausible solvent regeneration processes of organic solvent waste from the PHPS solution production, and their economics is evaluated for comparison.

KW - Economic Analysis

KW - Perhydropolysiloxazane

KW - Pyridine

KW - Recycle

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JO - Korean Journal of Chemical Engineering

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Economic analysis of waste recycle process in perhydropolysiloxazane synthesis

Abstract

Keywords

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