Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

S. J. Tark; Y. W. Ok; M. G. Kang; H. J. Lim; W. M. Kim; D. Kim

doi:10.1007/s10832-008-9532-0

Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

S. J. Tark, Y. W. Ok, M. G. Kang, H. J. Lim, W. M. Kim, D. Kim

Research output: Contribution to journal › Article › peer-review

44 Citations (Scopus)

Abstract

This study examined the effect of the hydrogen ratio on the electrical and optical properties of hydrogenated Al-doped zinc oxide (AZO) thin films deposited by rf magnetron sputtering using a ceramic target (98 wt% ZnO, 2 wt% Al₂O₃). Various AZO films on glass were prepared by changing the H₂/(Ar+H₂) ratio at room temperature. The AZO/H films showed a lower resistivity and a higher carrier concentration and mobility than the AZO films. However, the resistivity and mobility of the AZO/H films increased and decreased with increasing H₂ flow ratio, respectively. As a result, the AZO/H films grown with 2% H₂ addition showed excellent electrical properties with a resistivity of 4.98×10 ⁴ Ωcm. The UV-measurements showed that the optical transmission of the AZO/H films was >85% in the visible range with a wide optical band gap. In addition, the effect of H₂ flow ratio on the structure and composition of hydrogenated AZO thin films have also been studied.

Original language	English
Pages (from-to)	548-553
Number of pages	6
Journal	Journal of Electroceramics
Volume	23
Issue number	2-4
DOIs	https://doi.org/10.1007/s10832-008-9532-0
Publication status	Published - 2009 Oct

Bibliographical note

Funding Information:
Acknowledgement This work is outcome of the fostering project of the Best Lab supported financially by the Ministry of Commerce, Industry and Energy (MOCIE)

Keywords

Al doping
Hydrogenated
Rf magnetron sputtering
ZnO

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Mechanics of Materials
Materials Chemistry
Electrical and Electronic Engineering

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title = "Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films",

abstract = "This study examined the effect of the hydrogen ratio on the electrical and optical properties of hydrogenated Al-doped zinc oxide (AZO) thin films deposited by rf magnetron sputtering using a ceramic target (98 wt% ZnO, 2 wt% Al2O3). Various AZO films on glass were prepared by changing the H2/(Ar+H2) ratio at room temperature. The AZO/H films showed a lower resistivity and a higher carrier concentration and mobility than the AZO films. However, the resistivity and mobility of the AZO/H films increased and decreased with increasing H2 flow ratio, respectively. As a result, the AZO/H films grown with 2% H2 addition showed excellent electrical properties with a resistivity of 4.98×10 4 Ωcm. The UV-measurements showed that the optical transmission of the AZO/H films was >85% in the visible range with a wide optical band gap. In addition, the effect of H2 flow ratio on the structure and composition of hydrogenated AZO thin films have also been studied.",

keywords = "Al doping, Hydrogenated, Rf magnetron sputtering, ZnO",

author = "Tark, {S. J.} and Ok, {Y. W.} and Kang, {M. G.} and Lim, {H. J.} and Kim, {W. M.} and D. Kim",

note = "Funding Information: Acknowledgement This work is outcome of the fostering project of the Best Lab supported financially by the Ministry of Commerce, Industry and Energy (MOCIE)",

year = "2009",

month = oct,

doi = "10.1007/s10832-008-9532-0",

language = "English",

volume = "23",

pages = "548--553",

journal = "Journal of Electroceramics",

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TY - JOUR

T1 - Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

AU - Tark, S. J.

AU - Ok, Y. W.

AU - Kang, M. G.

AU - Lim, H. J.

AU - Kim, W. M.

AU - Kim, D.

N1 - Funding Information: Acknowledgement This work is outcome of the fostering project of the Best Lab supported financially by the Ministry of Commerce, Industry and Energy (MOCIE)

PY - 2009/10

Y1 - 2009/10

N2 - This study examined the effect of the hydrogen ratio on the electrical and optical properties of hydrogenated Al-doped zinc oxide (AZO) thin films deposited by rf magnetron sputtering using a ceramic target (98 wt% ZnO, 2 wt% Al2O3). Various AZO films on glass were prepared by changing the H2/(Ar+H2) ratio at room temperature. The AZO/H films showed a lower resistivity and a higher carrier concentration and mobility than the AZO films. However, the resistivity and mobility of the AZO/H films increased and decreased with increasing H2 flow ratio, respectively. As a result, the AZO/H films grown with 2% H2 addition showed excellent electrical properties with a resistivity of 4.98×10 4 Ωcm. The UV-measurements showed that the optical transmission of the AZO/H films was >85% in the visible range with a wide optical band gap. In addition, the effect of H2 flow ratio on the structure and composition of hydrogenated AZO thin films have also been studied.

AB - This study examined the effect of the hydrogen ratio on the electrical and optical properties of hydrogenated Al-doped zinc oxide (AZO) thin films deposited by rf magnetron sputtering using a ceramic target (98 wt% ZnO, 2 wt% Al2O3). Various AZO films on glass were prepared by changing the H2/(Ar+H2) ratio at room temperature. The AZO/H films showed a lower resistivity and a higher carrier concentration and mobility than the AZO films. However, the resistivity and mobility of the AZO/H films increased and decreased with increasing H2 flow ratio, respectively. As a result, the AZO/H films grown with 2% H2 addition showed excellent electrical properties with a resistivity of 4.98×10 4 Ωcm. The UV-measurements showed that the optical transmission of the AZO/H films was >85% in the visible range with a wide optical band gap. In addition, the effect of H2 flow ratio on the structure and composition of hydrogenated AZO thin films have also been studied.

KW - Al doping

KW - Hydrogenated

KW - Rf magnetron sputtering

KW - ZnO

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JF - Journal of Electroceramics

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ER -

Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

Abstract

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Keywords

ASJC Scopus subject areas

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