Abstract
We have developed a new passivation method of MEMS-based biosensors using parylene-c for application of an electrical protein mass detection system in a liquid environment. Because the adhesion property of gold for protein-protein interactions on parylene-c is poor, we performed atmospheric-plasma treatment of the parylene-c surface for adhesion enhancement. The surface properties of the treated parylene-c surfaces were investigated by measuring the contact angle, calculating the surface energy, observing the microstructure with a scanning electron microscope images, measuring the root-mean-square (RMS) roughness, and performing tape-test analysis. The surface energy increase of parylene-c due to the atmospheric-plasma treatment was demonstrated using the water-drop method with water and formamide. An atmospheric-plasma treatment for 120 seconds was beneficial, resulting in a surface energy increase of gold on the parylene-c films. The adhesion improvement of gold on the parylene-c was attributed to increased grain size and increased RMS roughness.
| Original language | English |
|---|---|
| Pages (from-to) | 1168-1172 |
| Number of pages | 5 |
| Journal | Journal of the Korean Physical Society |
| Volume | 44 |
| Issue number | 5 I |
| Publication status | Published - 2004 May |
Keywords
- Adhesion
- Atmosphere plasma
- Contact angle
- Parylene-c
ASJC Scopus subject areas
- General Physics and Astronomy