Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates

Jung Min Lee; Byung Hyun Choi; Mi Jung Ji; Yong Tae An; Jung Ho Park; Jae Hong Kwon; Byeong Kwon Ju

doi:10.1016/j.tsf.2009.01.149

Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates

Jung Min Lee, Byung Hyun Choi, Mi Jung Ji, Yong Tae An, Jung Ho Park, Jae Hong Kwon, Byeong Kwon Ju

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In₂O₃:SnO₂, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO₂ or Al₂O₃ between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al₂O₃ barrier layer, show better properties than those deposited on the SiO₂ barrier layer.

Original language	English
Pages (from-to)	4074-4077
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	14
DOIs	https://doi.org/10.1016/j.tsf.2009.01.149
Publication status	Published - 2009 May 29

Bibliographical note

Funding Information:
This work was supported in part by the New Growth Engine Display Center funded by the Ministry of Knowledge Economy and in part by the National Research Laboratory under the Grant NRL (R0A-2007-000-20111-0) Program of the Education, Ministry of Science and Technology (Korea Science and Engineering Foundation).

Keywords

Barrier layer
Diffusion
Indium tin oxide (ITO)
RF-magnetron sputtering
Soda lime glass (SLG)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2009.01.149

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title = "Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates",

abstract = "In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.",

keywords = "Barrier layer, Diffusion, Indium tin oxide (ITO), RF-magnetron sputtering, Soda lime glass (SLG)",

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note = "Funding Information: This work was supported in part by the New Growth Engine Display Center funded by the Ministry of Knowledge Economy and in part by the National Research Laboratory under the Grant NRL (R0A-2007-000-20111-0) Program of the Education, Ministry of Science and Technology (Korea Science and Engineering Foundation).",

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AU - Lee, Jung Min

AU - Choi, Byung Hyun

AU - Ji, Mi Jung

AU - An, Yong Tae

AU - Park, Jung Ho

AU - Kwon, Jae Hong

AU - Ju, Byeong Kwon

N1 - Funding Information: This work was supported in part by the New Growth Engine Display Center funded by the Ministry of Knowledge Economy and in part by the National Research Laboratory under the Grant NRL (R0A-2007-000-20111-0) Program of the Education, Ministry of Science and Technology (Korea Science and Engineering Foundation).

PY - 2009/5/29

Y1 - 2009/5/29

N2 - In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.

AB - In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.

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KW - RF-magnetron sputtering

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Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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