Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates

Jung Min Lee, Byung Hyun Choi, Mi Jung Ji, Yong Tae An, Jung Ho Park, Jae Hong Kwon, Byeong Kwon Ju

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.

Original languageEnglish
Pages (from-to)4074-4077
Number of pages4
JournalThin Solid Films
Issue number14
Publication statusPublished - 2009 May 29


  • Barrier layer
  • Diffusion
  • Indium tin oxide (ITO)
  • RF-magnetron sputtering
  • Soda lime glass (SLG)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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