Abstract
In this paper, the electrical, structural and optical properties of indium tin oxide (ITO) films deposited on soda lime glass (SLG) haven been investigated, along with high strain point glass (HSPG) substrate, through radio frequency magnetron sputtering using a ceramic target (In2O3:SnO2, 90:10 wt.%). The ITO films deposited on the SLG show a high electrical resistivity and structural defects compared with those deposited on HSPG due to the Na ions from the SLG diffusing to the ITO film by annealing. However, these properties can be improved by intercalating a barrier layer of SiO2 or Al2O3 between the ITO film and the SLG substrate. SIMS analysis has confirmed that the barrier layer inhibits the Na ion's diffusion from the SLG. In particular, the ITO films deposited on the Al2O3 barrier layer, show better properties than those deposited on the SiO2 barrier layer.
Original language | English |
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Pages (from-to) | 4074-4077 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 517 |
Issue number | 14 |
DOIs | |
Publication status | Published - 2009 May 29 |
Keywords
- Barrier layer
- Diffusion
- Indium tin oxide (ITO)
- RF-magnetron sputtering
- Soda lime glass (SLG)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry