Effect of capping layer on the crystallization of amorphous CoFeB

Ha Chang Chung, Young Ho Lee, Seong Rae Lee

    Research output: Contribution to journalArticlepeer-review

    8 Citations (Scopus)

    Abstract

    We investigated the effects of capping layer on the crystallization of amorphous top-CoFeB electrode in the glass/CoFeB/MgO(001)/CoFeB/cap stack. Evolution of texture and crystallization of the top-CoFeB electrode can be affected by the texture and the crystallinity of the capping layer. When the (002)-textured Ru capping layer was used, a (110) texture of CoFeB was developed during annealing at 350°C for 90 min. On the other hand, when the amorphous TiAl capping layer was used, a (002) texture of the CoFeB was developed during crystallization due to MgO (001) texture seeding effect. Consequently, the texture evolution of the amorphous top-CoFeB electrode during annealing could be controlled by the texture and crystallinity of the adjacent capping layer.

    Original languageEnglish
    Pages (from-to)3995-3998
    Number of pages4
    JournalPhysica Status Solidi (A) Applications and Materials Science
    Volume204
    Issue number12
    DOIs
    Publication statusPublished - 2007 Dec

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering
    • Materials Chemistry

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