Effect of capping layer on the crystallization of amorphous CoFeB

Ha Chang Chung; Young Ho Lee; Seong Rae Lee

doi:10.1002/pssa.200777336

Effect of capping layer on the crystallization of amorphous CoFeB

Ha Chang Chung, Young Ho Lee, Seong Rae Lee

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

We investigated the effects of capping layer on the crystallization of amorphous top-CoFeB electrode in the glass/CoFeB/MgO(001)/CoFeB/cap stack. Evolution of texture and crystallization of the top-CoFeB electrode can be affected by the texture and the crystallinity of the capping layer. When the (002)-textured Ru capping layer was used, a (110) texture of CoFeB was developed during annealing at 350°C for 90 min. On the other hand, when the amorphous TiAl capping layer was used, a (002) texture of the CoFeB was developed during crystallization due to MgO (001) texture seeding effect. Consequently, the texture evolution of the amorphous top-CoFeB electrode during annealing could be controlled by the texture and crystallinity of the adjacent capping layer.

Original language	English
Pages (from-to)	3995-3998
Number of pages	4
Journal	Physica Status Solidi (A) Applications and Materials Science
Volume	204
Issue number	12
DOIs	https://doi.org/10.1002/pssa.200777336
Publication status	Published - 2007 Dec

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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abstract = "We investigated the effects of capping layer on the crystallization of amorphous top-CoFeB electrode in the glass/CoFeB/MgO(001)/CoFeB/cap stack. Evolution of texture and crystallization of the top-CoFeB electrode can be affected by the texture and the crystallinity of the capping layer. When the (002)-textured Ru capping layer was used, a (110) texture of CoFeB was developed during annealing at 350°C for 90 min. On the other hand, when the amorphous TiAl capping layer was used, a (002) texture of the CoFeB was developed during crystallization due to MgO (001) texture seeding effect. Consequently, the texture evolution of the amorphous top-CoFeB electrode during annealing could be controlled by the texture and crystallinity of the adjacent capping layer.",

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T1 - Effect of capping layer on the crystallization of amorphous CoFeB

AU - Chung, Ha Chang

AU - Lee, Young Ho

AU - Lee, Seong Rae

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N2 - We investigated the effects of capping layer on the crystallization of amorphous top-CoFeB electrode in the glass/CoFeB/MgO(001)/CoFeB/cap stack. Evolution of texture and crystallization of the top-CoFeB electrode can be affected by the texture and the crystallinity of the capping layer. When the (002)-textured Ru capping layer was used, a (110) texture of CoFeB was developed during annealing at 350°C for 90 min. On the other hand, when the amorphous TiAl capping layer was used, a (002) texture of the CoFeB was developed during crystallization due to MgO (001) texture seeding effect. Consequently, the texture evolution of the amorphous top-CoFeB electrode during annealing could be controlled by the texture and crystallinity of the adjacent capping layer.

AB - We investigated the effects of capping layer on the crystallization of amorphous top-CoFeB electrode in the glass/CoFeB/MgO(001)/CoFeB/cap stack. Evolution of texture and crystallization of the top-CoFeB electrode can be affected by the texture and the crystallinity of the capping layer. When the (002)-textured Ru capping layer was used, a (110) texture of CoFeB was developed during annealing at 350°C for 90 min. On the other hand, when the amorphous TiAl capping layer was used, a (002) texture of the CoFeB was developed during crystallization due to MgO (001) texture seeding effect. Consequently, the texture evolution of the amorphous top-CoFeB electrode during annealing could be controlled by the texture and crystallinity of the adjacent capping layer.

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Effect of capping layer on the crystallization of amorphous CoFeB

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