Effect of CMP on the Te segregation in Ge 2Sb 2Te 5 films

  • Dong Hee Shin*
  • , Dong Hyun Lee
  • , Min Gun Jeong
  • , Hyung Soon Park
  • , Dae Soon Lim
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

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