Effect of controlled growth dynamics on the microstructure of nonpolar a-plane GaN revealed by X-ray diffraction

Qian Sun, Tsung Shine Ko, Christopher D. Yerino, Yu Zhang, In Hwan Lee, Jung Han, Tien Chang Lu, Hao Chung Kuo, Shing Chung Wang

Research output: Contribution to journalArticlepeer-review

43 Citations (Scopus)

Abstract

This paper reports the effect of controlled growth dynamics, as monitored by in situ optical reflectance, on the microstructure of nonpolar aplane GaN films grown on r-plane sapphire. The mosaic microstructure of a-plane GaN and its anisotropy are evaluated by X-ray rocking curve (XRC) measurements. By inserting a pronounced islanding stage followed by an enhanced lateral growth, pit-free a-plane GaN has been achieved showing an XRC linewidth of -0:18 and -0:3° for on- and off-axes planes, respectively, with only minor anisotropy. The density of basal-plane stacking faults is reduced by -70% as determined by a modified Williamson-Hall X-ray analysis.

Original languageEnglish
Article number071002
JournalJapanese journal of applied physics
Volume48
Issue number7 PART 1
DOIs
Publication statusPublished - 2009 Jul
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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