TY - JOUR
T1 - Effect of controlled growth dynamics on the microstructure of nonpolar a-plane GaN revealed by X-ray diffraction
AU - Sun, Qian
AU - Ko, Tsung Shine
AU - Yerino, Christopher D.
AU - Zhang, Yu
AU - Lee, In Hwan
AU - Han, Jung
AU - Lu, Tien Chang
AU - Kuo, Hao Chung
AU - Wang, Shing Chung
PY - 2009/7
Y1 - 2009/7
N2 - This paper reports the effect of controlled growth dynamics, as monitored by in situ optical reflectance, on the microstructure of nonpolar aplane GaN films grown on r-plane sapphire. The mosaic microstructure of a-plane GaN and its anisotropy are evaluated by X-ray rocking curve (XRC) measurements. By inserting a pronounced islanding stage followed by an enhanced lateral growth, pit-free a-plane GaN has been achieved showing an XRC linewidth of -0:18 and -0:3° for on- and off-axes planes, respectively, with only minor anisotropy. The density of basal-plane stacking faults is reduced by -70% as determined by a modified Williamson-Hall X-ray analysis.
AB - This paper reports the effect of controlled growth dynamics, as monitored by in situ optical reflectance, on the microstructure of nonpolar aplane GaN films grown on r-plane sapphire. The mosaic microstructure of a-plane GaN and its anisotropy are evaluated by X-ray rocking curve (XRC) measurements. By inserting a pronounced islanding stage followed by an enhanced lateral growth, pit-free a-plane GaN has been achieved showing an XRC linewidth of -0:18 and -0:3° for on- and off-axes planes, respectively, with only minor anisotropy. The density of basal-plane stacking faults is reduced by -70% as determined by a modified Williamson-Hall X-ray analysis.
UR - http://www.scopus.com/inward/record.url?scp=72049118719&partnerID=8YFLogxK
U2 - 10.1143/JJAP.48.071002
DO - 10.1143/JJAP.48.071002
M3 - Article
AN - SCOPUS:72049118719
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7 PART 1
M1 - 071002
ER -