Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

Jae Hoon Jung; Byeong Kwon Ju; Hoon Kim; Yun Lee Hi; Suk Jae Chung; Jin Jang; Myung Hwan Oh

doi:10.1109/16.725258

Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

Jae Hoon Jung, Byeong Kwon Ju, Hoon Kim, Yun Lee Hi, Suk Jae Chung, Jin Jang, Myung Hwan Oh

Department of Physics

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

Original language	English
Pages (from-to)	2232-2237
Number of pages	6
Journal	IEEE Transactions on Electron Devices
Volume	45
Issue number	10
DOIs	https://doi.org/10.1109/16.725258
Publication status	Published - 1998

Keywords

Emission current
Emission stability
Hydrogenfree dlc
Mo fea's pecvd

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/16.725258

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title = "Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays",

abstract = "We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.",

keywords = "Emission current, Emission stability, Hydrogenfree dlc, Mo fea's pecvd",

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T1 - Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

AU - Jung, Jae Hoon

AU - Ju, Byeong Kwon

AU - Kim, Hoon

AU - Lee Hi, Yun

AU - Chung, Suk Jae

AU - Jang, Jin

AU - Oh, Myung Hwan

PY - 1998

Y1 - 1998

N2 - We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

AB - We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

KW - Emission current

KW - Emission stability

KW - Hydrogenfree dlc

KW - Mo fea's pecvd

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JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

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Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

Abstract

Keywords

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