Effect of electric field on chemical mechanical polishing of langasite

Dae Soon Lim, In Ho Yoon, Steven Danyluk

    Research output: Contribution to journalArticlepeer-review

    10 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Effect of electric field on chemical mechanical polishing of langasite'. Together they form a unique fingerprint.

    Keyphrases

    Engineering

    Material Science