Effect of electron beam irradiation on the electrical and optical properties of ITO/Ag/ITO and IZO/Ag/IZO films

C. H. Hong; Y. J. Jo; H. A. Kim; I. H. Lee; J. S. Kwak

doi:10.1016/j.tsf.2011.01.220

Effect of electron beam irradiation on the electrical and optical properties of ITO/Ag/ITO and IZO/Ag/IZO films

C. H. Hong, Y. J. Jo, H. A. Kim, I. H. Lee, J. S. Kwak

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

We have investigated the effect of electron beam irradiation as well as insertion of a Ag layer on the electrical and optical properties of the ITO or IZO films. The results show that electron beam irradiation as well as inserting a very thin Ag layer can significantly reduce sheet resistance of the ITO/Ag/ITO and IZO/Ag/IZO films. The electron beam irradiation also increases light transmittance and optical band gap of the ITO/Ag/ITO multilayer films; meanwhile, it has not influence on the transmittance of the IZO/Ag/IZO films. These results can be explained by that In and Zn cation in IZO film have strong tendency to preserve their coordination with oxygen.

Original language	English
Pages (from-to)	6829-6833
Number of pages	5
Journal	Thin Solid Films
Volume	519
Issue number	20
DOIs	https://doi.org/10.1016/j.tsf.2011.01.220
Publication status	Published - 2011 Aug 1
Externally published	Yes

Bibliographical note

Funding Information:
This work was supported by the IT R&D program of MKE/KEIT ( KI002182 , TFT backplane technology for next generation display).

Keywords

Electron beam
TCO

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2011.01.220

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title = "Effect of electron beam irradiation on the electrical and optical properties of ITO/Ag/ITO and IZO/Ag/IZO films",

abstract = "We have investigated the effect of electron beam irradiation as well as insertion of a Ag layer on the electrical and optical properties of the ITO or IZO films. The results show that electron beam irradiation as well as inserting a very thin Ag layer can significantly reduce sheet resistance of the ITO/Ag/ITO and IZO/Ag/IZO films. The electron beam irradiation also increases light transmittance and optical band gap of the ITO/Ag/ITO multilayer films; meanwhile, it has not influence on the transmittance of the IZO/Ag/IZO films. These results can be explained by that In and Zn cation in IZO film have strong tendency to preserve their coordination with oxygen.",

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author = "Hong, {C. H.} and Jo, {Y. J.} and Kim, {H. A.} and Lee, {I. H.} and Kwak, {J. S.}",

note = "Funding Information: This work was supported by the IT R&D program of MKE/KEIT ( KI002182 , TFT backplane technology for next generation display).",

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doi = "10.1016/j.tsf.2011.01.220",

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AU - Hong, C. H.

AU - Jo, Y. J.

AU - Kim, H. A.

AU - Lee, I. H.

AU - Kwak, J. S.

N1 - Funding Information: This work was supported by the IT R&D program of MKE/KEIT ( KI002182 , TFT backplane technology for next generation display).

PY - 2011/8/1

Y1 - 2011/8/1

N2 - We have investigated the effect of electron beam irradiation as well as insertion of a Ag layer on the electrical and optical properties of the ITO or IZO films. The results show that electron beam irradiation as well as inserting a very thin Ag layer can significantly reduce sheet resistance of the ITO/Ag/ITO and IZO/Ag/IZO films. The electron beam irradiation also increases light transmittance and optical band gap of the ITO/Ag/ITO multilayer films; meanwhile, it has not influence on the transmittance of the IZO/Ag/IZO films. These results can be explained by that In and Zn cation in IZO film have strong tendency to preserve their coordination with oxygen.

AB - We have investigated the effect of electron beam irradiation as well as insertion of a Ag layer on the electrical and optical properties of the ITO or IZO films. The results show that electron beam irradiation as well as inserting a very thin Ag layer can significantly reduce sheet resistance of the ITO/Ag/ITO and IZO/Ag/IZO films. The electron beam irradiation also increases light transmittance and optical band gap of the ITO/Ag/ITO multilayer films; meanwhile, it has not influence on the transmittance of the IZO/Ag/IZO films. These results can be explained by that In and Zn cation in IZO film have strong tendency to preserve their coordination with oxygen.

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Effect of electron beam irradiation on the electrical and optical properties of ITO/Ag/ITO and IZO/Ag/IZO films

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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