Effect of excimer laser annealing on the properties of ZnO thin film prepared by sol-gel method

Kyoungwon Kim, Sangsig Kim, Sang Yeol Lee

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)


Pristine ZnO thin films have been deposited with zinc acetate [Zn(CH 3COO)2], mono-ethanolamine (stabilizer), and isopropanol solutions by sol-gel method. After deposition, pristine ZnO thin films have been irradiated by excimer laser (λ = 248, KrF) source with energy density of 50 mJ/cm2 for 30 sec. The effect of excimer laser annealing on the optical and structural properties of ZnO thin films are investigated by photoluminescence and field emission scanning electron microscope. As-grown ZnO thin films show a huge peak of visible region and a wide full width at half maximum (FWHM) of UV region due to low quality with amorphous ZnO thin films. After KrF excimer laser annealing, ZnO thin films show intense near-band-edge (NBE) emission and weak deep-level emission. The optically improved pristine ZnO thin films have demonstrated that excimer laser annealing is novel treatment process at room temperature.

Original languageEnglish
Pages (from-to)585-588
Number of pages4
JournalCurrent Applied Physics
Issue number2
Publication statusPublished - 2012 Mar

Bibliographical note

Funding Information:
This research was supported by a grant (code #: 2011K000208 ) Center for Nanostructured Materials Technology ’ under ‘21st Century Frontier R&D Programs’ of the Ministry of Education, Science and Technology, Korea, as well as by the System Integrated Semiconductor Base Technology Development Program funded from the Ministry of Knowledge and Economy (MKE), South Korea.


  • Excimer laser
  • Laser annealing
  • ZnO

ASJC Scopus subject areas

  • General Materials Science
  • General Physics and Astronomy


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