Effect of fluorine doping on the properties of ZnO films deposited by radio frequency magnetron sputtering

Engineering & Materials Science

• Fluorine 100%
• Magnetron sputtering 96%
• Doping (additives) 80%
• Carrier concentration 14%
• Vacuum 13%
• Hall mobility 10%
• Annealing 10%
• Optical properties 6%
• Crystallinity 6%
• Structural properties 5%
• Electric properties 5%
• Structural analysis 5%
• X ray diffraction 5%
• Glass 4%
• Temperature 2%

Physics & Astronomy

• fluorine 72%
• radio frequencies 62%
• magnetron sputtering 60%
• electrical resistivity 9%
• vacuum 9%
• annealing 6%
• structural analysis 5%
• valleys 5%
• figure of merit 4%
• crystallinity 4%
• electrical properties 3%
• optical properties 3%
• glass 2%
• room temperature 2%
• diffraction 2%
• x rays 2%

Chemical Compounds

• Magnetron Sputtering 83%
• Fluorine Atom 63%
• Liquid Film 34%
• Figure of Merit 5%
• Amount 4%
• Electrical Property 4%
• Compound Mobility 3%
• Crystallinity 3%
• Optical Property 3%
• Glass 3%
• Ambient Reaction Temperature 2%
• X-Ray Diffraction 2%
• Reduction 2%