Fingerprint
Dive into the research topics of 'Effect of moisture in a vacuum chamber on the deposition of c-BN thin film using an unbalanced magnetron sputtering method'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effect of moisture in a vacuum chamber on the deposition of c-BN thin film using an unbalanced magnetron sputtering method
Eun Sook Lee, Jong Keuk Park, Wook Seong Lee, Tae Yeon Seong, Young Joon Baik
Research output: Contribution to journal › Article › peer-review
1
Citation
(Scopus)