Effect of nitrogen doping on the performance of Ge₂Sb ₂Te₅ films in chemical mechanical polishing

Engineering & Materials Science

• Chemical mechanical polishing 100%
• Doping (additives) 85%
• Nitrogen 70%
• Surface roughness 23%
• Flow rate 21%
• Crystallization 20%
• X ray diffraction 18%
• Rapid thermal annealing 14%
• Diffraction patterns 13%
• Crystal structure 12%
• Atomic force microscopy 12%
• Threshold voltage 10%
• Diffraction 10%
• Crystalline materials 10%
• Flow of gases 9%
• Scanning electron microscopy 7%
• Electric potential 4%

Physics & Astronomy

• polishing 80%
• nitrogen 56%
• performance 33%
• machining 30%
• surface roughness 24%
• flow velocity 22%
• crystallization 14%
• diffraction 10%
• threshold voltage 9%
• gas flow 8%
• x rays 8%
• diffraction patterns 7%
• crystal structure 7%
• atomic force microscopy 7%
• scanning electron microscopy 6%
• annealing 5%
• electric potential 5%