Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste

Ki Young Dong; Dae Jin Ham; Byung Hyun Kang; Keunsoo Lee; Jinnil Choi; Jin Woo Lee; Hyang Hee Choi; Byeong Kwon Ju

doi:10.1016/j.talanta.2011.11.040

Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste

Ki Young Dong, Dae Jin Ham, Byung Hyun Kang, Keunsoo Lee, Jinnil Choi, Jin Woo Lee, Hyang Hee Choi, Byeong Kwon Ju

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O₂ plasma-treated SWCNT pastes exhibited a large response to NO₂ exposure and the fluorinated gas, such as CF₄ and SF₆, plasma-treated SWCNT pastes exhibited a large response to NH₃ exposure.

Original language	English
Pages (from-to)	33-37
Number of pages	5
Journal	Talanta
Volume	89
DOIs	https://doi.org/10.1016/j.talanta.2011.11.040
Publication status	Published - 2012 Jan 30

Keywords

Carbon nanotube
Gas sensors
Plasma treatment
Screen printing

ASJC Scopus subject areas

Analytical Chemistry

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10.1016/j.talanta.2011.11.040

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title = "Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste",

abstract = "The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure.",

keywords = "Carbon nanotube, Gas sensors, Plasma treatment, Screen printing",

author = "Dong, {Ki Young} and Ham, {Dae Jin} and Kang, {Byung Hyun} and Keunsoo Lee and Jinnil Choi and Lee, {Jin Woo} and Choi, {Hyang Hee} and Ju, {Byeong Kwon}",

note = "Funding Information: This work was supported by World Class University (WCU, R32-2009-000-10082-0), Project of the Ministry of Education, Science and Technology (Korea Science and Engineering Foundation) and partially supported by Basic Science Research Program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (No. 2009-0083126). This work was supported by Seoul Metropolitan Government through Seoul Research and Business Development (grant no. PA090685 )",

year = "2012",

month = jan,

day = "30",

doi = "10.1016/j.talanta.2011.11.040",

language = "English",

volume = "89",

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AU - Dong, Ki Young

AU - Ham, Dae Jin

AU - Kang, Byung Hyun

AU - Lee, Keunsoo

AU - Choi, Jinnil

AU - Lee, Jin Woo

AU - Choi, Hyang Hee

AU - Ju, Byeong Kwon

N1 - Funding Information: This work was supported by World Class University (WCU, R32-2009-000-10082-0), Project of the Ministry of Education, Science and Technology (Korea Science and Engineering Foundation) and partially supported by Basic Science Research Program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (No. 2009-0083126). This work was supported by Seoul Metropolitan Government through Seoul Research and Business Development (grant no. PA090685 )

PY - 2012/1/30

Y1 - 2012/1/30

N2 - The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure.

AB - The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure.

KW - Carbon nanotube

KW - Gas sensors

KW - Plasma treatment

KW - Screen printing

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DO - 10.1016/j.talanta.2011.11.040

M3 - Article

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AN - SCOPUS:84856364962

SN - 0039-9140

VL - 89

SP - 33

EP - 37

JO - Talanta

JF - Talanta

ER -

Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste

Abstract

Keywords

ASJC Scopus subject areas

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