Abstract
The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure.
Original language | English |
---|---|
Pages (from-to) | 33-37 |
Number of pages | 5 |
Journal | Talanta |
Volume | 89 |
DOIs | |
Publication status | Published - 2012 Jan 30 |
Bibliographical note
Funding Information:This work was supported by World Class University (WCU, R32-2009-000-10082-0), Project of the Ministry of Education, Science and Technology (Korea Science and Engineering Foundation) and partially supported by Basic Science Research Program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (No. 2009-0083126). This work was supported by Seoul Metropolitan Government through Seoul Research and Business Development (grant no. PA090685 )
Keywords
- Carbon nanotube
- Gas sensors
- Plasma treatment
- Screen printing
ASJC Scopus subject areas
- Analytical Chemistry