Keyphrases
Surface Properties
100%
Substrate Effect
100%
Ge2Sb2Te5
100%
Ge2Sb2Te5 Film
100%
Substrate Temperature
100%
Chemical Mechanical Polishing
100%
Material Removal Rate
42%
Polishing Process
42%
Surface Roughness
28%
Hillocks
14%
Grain Size
14%
Annealing Temperature
14%
Strong Correlation
14%
Thermal Effect
14%
Surface Material
14%
Surface Quality
14%
Frictional Heat
14%
Oxidation Ability
14%
Engineering
Substrate Temperature
100%
Chemical Mechanical Polishing
100%
Polishing Process
50%
Material Removal Rate
50%
Annealing Temperature
16%
Increasing Substrate Temperature
16%
Surface Quality
16%
Surface Material
16%
Thermal Effect
16%
Material Science
Surface Property
100%
Film
100%
Chemical Mechanical Planarization
100%
Surface Roughness
25%
Annealing
12%
Oxidation Reaction
12%
Grain Size
12%