FingerprintDive into the research topics of 'Effect of the N2/(Ar+N2) flow ratio on the synthesis of zirconium nitride thin films by DC reactive sputtering'. Together they form a unique fingerprint.
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Dong Ho Kim, Chul Min Kim, Eun Hong Kim, Young Chul Shin, Tae Geun Kim, Cheong Hyun Roh, Cheol Koo Hahn
Research output: Contribution to journal › Article › peer-review