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Effect of the N2/(Ar+N2) flow ratio on the synthesis of zirconium nitride thin films by DC reactive sputtering
Dong Ho Kim, Chul Min Kim, Eun Hong Kim, Young Chul Shin, Tae Geun Kim, Cheong Hyun Roh, Cheol Koo Hahn
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)