Keyphrases
Electrical Properties
100%
Silica
100%
Capping Layer
100%
Nickel Silicide
100%
Thermal Stability
50%
Sheet Resistance
50%
X Ray Diffraction
50%
Increased Temperature
50%
Annealing
50%
Structural Properties
50%
Rapid Thermal Annealing
50%
Order of Magnitude
50%
Thermal Annealing Temperature
50%
NiSi
50%
NiSi2
50%
Resistance Increase
50%
Reverse Leakage Current
50%
Engineering
Capping Layer
100%
Sheet Resistance
50%
Ray Diffraction
50%
Increasing Temperature
50%
Rapid Thermal Annealing
50%
Annealing Temperature
50%
Structural Property
50%
Earth and Planetary Sciences
Capping
100%
Silicide
100%
Electrical Property
100%
Thermal Stability
33%
X Ray Diffraction
33%
Physics
X Ray Diffraction
100%
Electrical Properties
100%
Chemical Engineering
Silicide
100%
Sheet Resistance
50%