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Effects of Al content on the electrical properties of LaxAl yOz films grown on TiN substrate by atomic layer deposition

  • Su Young Kim*
  • , Hyuk Kwon
  • , Sang Jin Jo
  • , Jeong Sook Ha
  • , Won Tae Park
  • , Dong Kyun Kang
  • , Byong Ho Kim
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    17   Link opens in a new tab Citations (Scopus)

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    Material Science