Effects of annealing on the microstructures and mechanical properties of TiN/AlN nano-multilayer films prepared by ion-beam assisted deposition

Engineering & Materials Science

• Ion beam assisted deposition 100%
• Multilayer films 85%
• Annealing 55%
• Hardness 44%
• Microstructure 37%
• Mechanical properties 36%
• Multilayers 27%
• High resolution transmission electron microscopy 22%
• Nanoindentation 16%
• Temperature 16%
• Argon 15%
• X ray diffraction 13%
• Nitrogen 13%
• Ions 12%
• Metals 9%
• Gases 8%
• Hot Temperature 6%

Physics & Astronomy

• hardness 44%
• ion beams 43%
• mechanical properties 37%
• annealing 33%
• microstructure 32%
• bombardment 13%
• argon 10%
• wafers 10%
• nitrogen 10%
• atmospheres 9%
• transmission electron microscopy 9%
• augmentation 8%
• high resolution 8%
• temperature 8%
• diffraction 7%
• gases 7%
• metals 7%
• ions 6%
• x rays 6%

Chemical Compounds

• Ion Beam 61%
• Annealing 44%
• Superlattice 43%
• Microstructure 37%
• Liquid Film 27%
• Crystal System 16%
• Deposition Process 15%
• Multilayer 12%
• Nitrogen 8%
• Gas 7%
• X-Ray Diffraction 6%
• Metal 6%
• Ion 5%