Effects of defect density on ultrathin graphene-based metal diffusion barriers

Sooyeoun Oh; Younghun Jung; Jihyun Kim

doi:10.1116/1.4929833

Effects of defect density on ultrathin graphene-based metal diffusion barriers

Sooyeoun Oh, Younghun Jung, Jihyun Kim

Department of Chemical and Biological Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700°C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene.

Original language	English
Article number	061510
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	33
Issue number	6
DOIs	https://doi.org/10.1116/1.4929833
Publication status	Published - 2015 Aug 19

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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Effects of defect density on ultrathin graphene-based metal diffusion barriers

Abstract

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