Effects of defect density on ultrathin graphene-based metal diffusion barriers

Sooyeoun Oh; Younghun Jung; Jihyun Kim

doi:10.1116/1.4929833

Effects of defect density on ultrathin graphene-based metal diffusion barriers

Sooyeoun Oh, Younghun Jung, Jihyun Kim

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700°C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene.

Original language	English
Article number	061510
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	33
Issue number	6
DOIs	https://doi.org/10.1116/1.4929833
Publication status	Published - 2015 Aug 19

Bibliographical note

Publisher Copyright:
© 2015 American Vacuum Society.

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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@article{e48f5fdab64c4547810091848e7da528,

title = "Effects of defect density on ultrathin graphene-based metal diffusion barriers",

abstract = "The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700°C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene.",

author = "Sooyeoun Oh and Younghun Jung and Jihyun Kim",

note = "Publisher Copyright: {\textcopyright} 2015 American Vacuum Society.",

year = "2015",

month = aug,

day = "19",

doi = "10.1116/1.4929833",

language = "English",

volume = "33",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Effects of defect density on ultrathin graphene-based metal diffusion barriers

AU - Oh, Sooyeoun

AU - Jung, Younghun

AU - Kim, Jihyun

PY - 2015/8/19

Y1 - 2015/8/19

N2 - The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700°C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene.

AB - The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700°C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene.

UR - http://www.scopus.com/inward/record.url?scp=84941029948&partnerID=8YFLogxK

U2 - 10.1116/1.4929833

DO - 10.1116/1.4929833

M3 - Article

AN - SCOPUS:84941029948

SN - 0734-2101

VL - 33

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

M1 - 061510

ER -

Effects of defect density on ultrathin graphene-based metal diffusion barriers

Abstract

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ASJC Scopus subject areas

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