Effects of e-beam parameters on sub-micron ferroelectric domain engineering in liquid phase epitaxy LiNbO3 by direct-write e-beam

Ji Won Son; Yin Yuen; Sergei S. Orlov; Lambertus Hesselink

Effects of e-beam parameters on sub-micron ferroelectric domain engineering in liquid phase epitaxy LiNbO₃ by direct-write e-beam

Ji Won Son^*
, Yin Yuen
, Sergei S. Orlov
, Lambertus Hesselink

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

6 Citations (Scopus)

Abstract

By using the direct-write e-beam technique with liquid phase epitaxy LiNbO₃ thin films, we have successfully produced sub-micron domain structures for achieving dynamically switchable filters in a periodically poled lithium niobate (PPLN) waveguide. The effects of direct-write e-beam parameters are investigated to achieve sub-micron periodic domain structures in homoepitaxial liquid phase epitaxy (LPE) LiNbO₃ thin films. More regular structures appear at acceleration voltages higher than 20 kV and areal dose range 350 μC/cm² - 450 μC/cm² with lower scanning speeds. Under these optimal conditions, an approximately 500 μm-long grating of a 1.1 μm period, consisting ∼180 nm domains is achieved.

Original language	English
Pages (from-to)	756-761
Number of pages	6
Journal	OSA Trends in Optics and Photonics Series
Volume	99
Publication status	Published - 2005
Externally published	Yes
Event	10th International Conference on Photorefractive, Effects, Materials, and Devices - Hainan, China Duration: 2005 Jul 19 → 2005 Jul 23

ASJC Scopus subject areas

General Engineering

Cite this

@article{31ba5381320c46a9b6347d61d4572432,

title = "Effects of e-beam parameters on sub-micron ferroelectric domain engineering in liquid phase epitaxy LiNbO3 by direct-write e-beam",

abstract = "By using the direct-write e-beam technique with liquid phase epitaxy LiNbO3 thin films, we have successfully produced sub-micron domain structures for achieving dynamically switchable filters in a periodically poled lithium niobate (PPLN) waveguide. The effects of direct-write e-beam parameters are investigated to achieve sub-micron periodic domain structures in homoepitaxial liquid phase epitaxy (LPE) LiNbO3 thin films. More regular structures appear at acceleration voltages higher than 20 kV and areal dose range 350 μC/cm2 - 450 μC/cm2 with lower scanning speeds. Under these optimal conditions, an approximately 500 μm-long grating of a 1.1 μm period, consisting ∼180 nm domains is achieved.",

author = "Son, \{Ji Won\} and Yin Yuen and Orlov, \{Sergei S.\} and Lambertus Hesselink",

year = "2005",

language = "English",

volume = "99",

pages = "756--761",

journal = "OSA Trends in Optics and Photonics Series",

issn = "1094-5695",

note = "10th International Conference on Photorefractive, Effects, Materials, and Devices ; Conference date: 19-07-2005 Through 23-07-2005",

}

TY - JOUR

T1 - Effects of e-beam parameters on sub-micron ferroelectric domain engineering in liquid phase epitaxy LiNbO3 by direct-write e-beam

AU - Son, Ji Won

AU - Yuen, Yin

AU - Orlov, Sergei S.

AU - Hesselink, Lambertus

PY - 2005

Y1 - 2005

N2 - By using the direct-write e-beam technique with liquid phase epitaxy LiNbO3 thin films, we have successfully produced sub-micron domain structures for achieving dynamically switchable filters in a periodically poled lithium niobate (PPLN) waveguide. The effects of direct-write e-beam parameters are investigated to achieve sub-micron periodic domain structures in homoepitaxial liquid phase epitaxy (LPE) LiNbO3 thin films. More regular structures appear at acceleration voltages higher than 20 kV and areal dose range 350 μC/cm2 - 450 μC/cm2 with lower scanning speeds. Under these optimal conditions, an approximately 500 μm-long grating of a 1.1 μm period, consisting ∼180 nm domains is achieved.

AB - By using the direct-write e-beam technique with liquid phase epitaxy LiNbO3 thin films, we have successfully produced sub-micron domain structures for achieving dynamically switchable filters in a periodically poled lithium niobate (PPLN) waveguide. The effects of direct-write e-beam parameters are investigated to achieve sub-micron periodic domain structures in homoepitaxial liquid phase epitaxy (LPE) LiNbO3 thin films. More regular structures appear at acceleration voltages higher than 20 kV and areal dose range 350 μC/cm2 - 450 μC/cm2 with lower scanning speeds. Under these optimal conditions, an approximately 500 μm-long grating of a 1.1 μm period, consisting ∼180 nm domains is achieved.

UR - https://www.scopus.com/pages/publications/33645215096

M3 - Conference article

AN - SCOPUS:33645215096

SN - 1094-5695

VL - 99

SP - 756

EP - 761

JO - OSA Trends in Optics and Photonics Series

JF - OSA Trends in Optics and Photonics Series

T2 - 10th International Conference on Photorefractive, Effects, Materials, and Devices

Y2 - 19 July 2005 through 23 July 2005

ER -

Effects of e-beam parameters on sub-micron ferroelectric domain engineering in liquid phase epitaxy LiNbO₃ by direct-write e-beam

Abstract

ASJC Scopus subject areas

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