Engineering & Materials Science
Silicides
100%
Structural properties
79%
Electric properties
77%
Nickel
68%
Hydrogen
58%
X ray spectroscopy
31%
Photoelectron spectroscopy
31%
Nickel oxide
28%
Rapid thermal annealing
28%
Sheet resistance
25%
Ion implantation
24%
Electron beams
21%
Transmission electron microscopy
18%
Annealing
18%
X ray diffraction
17%
Nitrogen
16%
Plasmas
16%
Ions
16%
Temperature
14%
Substrates
12%
Physics & Astronomy
silicides
75%
implantation
64%
nickel
58%
electrical properties
53%
hydrogen
44%
grain size
13%
nickel oxides
11%
annealing
10%
hydrogen ions
10%
submerging
9%
ion implantation
8%
x rays
8%
photoelectric emission
7%
nitrogen
6%
electron beams
6%
atmospheres
6%
dosage
6%
transmission electron microscopy
5%
temperature
5%
diffraction
4%
spectroscopy
4%
energy
2%
Chemical Compounds
Electrical Property
61%
Hydrogen
37%
Grain Size
34%
Rapid Thermal Annealing
27%
Liquid Film
26%
X-Ray Photoemission
23%
Ion Implantation
22%
Sheet Resistance
22%
Photoelectron Spectroscopy
18%
Annealing
14%
Dose
14%
Transmission Electron Microscopy
12%
Plasma
11%
Nitrogen
11%
Oxide
9%
X-Ray Diffraction
9%
Energy
8%
Ion
7%
Surface
5%