Effects of hydrogen plasma treatment condition on electrical properties of β-Ga2O3

A. Y. Polyakov, In Hwan Lee, N. B. Smirnov, E. B. Yakimov, I. V. Shchemerov, A. V. Chernykh, A. I. Kochkova, A. A. Vasilev, A. S. Shiko, Patrick H. Carey, F. Ren, S. J. Pearton

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Engineering & Materials Science