Effects of oxygen incorporation in GeSbTe films on electrical properties and thermal stability

Moon Hyung Jang, Seung Jong Park, Dong Hyeok Lim, Sung Jin Park, Mann Ho Cho, Seong Jin Cho, Yoon Ho Cho, Jong Heun Lee

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


Oxygen incorporated Ge2Sb2Te5 (GST) films were prepared by an ion beam sputtering deposition method. I-V curves of the oxygen incorporated GST active layer showed that the threshold voltage (Vth) varied, depending on the level of incorporated oxygen. In the case of a GST film with an elevated oxygen content of 30.8%, the GST layer melted at 9.02 V due to the instability conferred by the high oxygen content. The formation of Ge-deficient hexagonal phases such as GeSb2Te4 and Sb 2Te3 appear to be responsible for the Vth variation. Impedance analyses indicated that the resistance in GST films with oxygen contents of 16.7% and 21.7% had different origins. Thermal desorption spectroscopy data indicate that moisture and hydrocarbons were more readily desorbed at higher oxygen content because the oxygen incorporated GST films are more hydrophilic than undoped GST films.

Original languageEnglish
Article number092108
JournalApplied Physics Letters
Issue number9
Publication statusPublished - 2010

Bibliographical note

Funding Information:
This research was supported by the National Research Project for “Phase-Change Random Access Memory Development” sponsored by the Ministry of Knowledge Economy (MKE) of Korea.

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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