Effects of oxygen-plasma treatment on lanthanum-substituted bismuth titanate ferroelectric thin films

E. R. Park, Cheol Eui Lee, S. J. Yeom

    Research output: Contribution to journalArticlepeer-review

    5 Citations (Scopus)

    Abstract

    Oxygen-plasma treatment has been done on Bi3.25La 0.85Ti3O12 (BLT) films for lower crystallization temperatures and improved ferroelectric properties. The films, prepared by metal organic decomposition method on Pt and IrO2 electrodes sputtered on Al2O3/SiO2/Si substrates, were pre-annealed at the relatively low temperatures of 550 and 600 °C, followed by room temperature microwave oxygen-plasma treatment. The oxygen-plasma-treated BLT films showed very good ferroelectric characteristics after a final furnace annealing at 600 °C.

    Original languageEnglish
    Pages (from-to)185-188
    Number of pages4
    JournalThin Solid Films
    Volume497
    Issue number1-2
    DOIs
    Publication statusPublished - 2006 Feb 21

    Keywords

    • Ferroelectric properties
    • Plasma processing and deposition

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films
    • Metals and Alloys
    • Materials Chemistry

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